Nano-resonators for RF-enabled networked-control
نویسندگان
چکیده
Several types of microfabricated mechanical filters are analyzed for RF communications applications and their advantages over the traditional SAW or FBAR filters are described. GHz frequency operation requires sub-micron dimensions. This work focuses on the modeling of a filter with torsional mode vibration. Ansys finite element simulation has been performed to make comparison with the analytical modelling. These devices enable a networked approach to control along with a specific application to velocity estimation in servocontrol.
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